JPH02143131U - - Google Patents

Info

Publication number
JPH02143131U
JPH02143131U JP5150889U JP5150889U JPH02143131U JP H02143131 U JPH02143131 U JP H02143131U JP 5150889 U JP5150889 U JP 5150889U JP 5150889 U JP5150889 U JP 5150889U JP H02143131 U JPH02143131 U JP H02143131U
Authority
JP
Japan
Prior art keywords
chuck table
sealing member
suction
dicing
dicing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5150889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5150889U priority Critical patent/JPH02143131U/ja
Publication of JPH02143131U publication Critical patent/JPH02143131U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Prevention Of Fouling (AREA)
  • Jigs For Machine Tools (AREA)
JP5150889U 1989-04-28 1989-04-28 Pending JPH02143131U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5150889U JPH02143131U (en]) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5150889U JPH02143131U (en]) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02143131U true JPH02143131U (en]) 1990-12-05

Family

ID=31571017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5150889U Pending JPH02143131U (en]) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02143131U (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04118945U (ja) * 1991-04-04 1992-10-23 日本カーボン株式会社 研磨用バキユームチヤツク
JPH057414U (ja) * 1991-07-10 1993-02-02 株式会社デイスコ ダイシング装置におけるフレームのクランプ機構
JP2006281434A (ja) * 2005-03-11 2006-10-19 Disco Abrasive Syst Ltd ウェーハの保持機構
JP2010108996A (ja) * 2008-10-28 2010-05-13 Lintec Corp エキスパンド装置及びエキスパンド方法
JP2020015133A (ja) * 2018-07-25 2020-01-30 株式会社タカハシキカイ 真空チャック

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917159B2 (ja) * 1978-12-18 1984-04-19 花王株式会社 合成洗剤配合方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917159B2 (ja) * 1978-12-18 1984-04-19 花王株式会社 合成洗剤配合方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04118945U (ja) * 1991-04-04 1992-10-23 日本カーボン株式会社 研磨用バキユームチヤツク
JPH057414U (ja) * 1991-07-10 1993-02-02 株式会社デイスコ ダイシング装置におけるフレームのクランプ機構
JP2006281434A (ja) * 2005-03-11 2006-10-19 Disco Abrasive Syst Ltd ウェーハの保持機構
JP2010108996A (ja) * 2008-10-28 2010-05-13 Lintec Corp エキスパンド装置及びエキスパンド方法
JP2020015133A (ja) * 2018-07-25 2020-01-30 株式会社タカハシキカイ 真空チャック

Similar Documents

Publication Publication Date Title
JPH02143131U (en])
JPS6218362Y2 (en])
JPS6239968U (en])
JPH02135140U (en])
JPH01228748A (ja) ウェーハの接着方法
JPH03128943U (en])
JPS6237932U (en])
JPH02106308U (en])
JPS6389238U (en])
JPS60927U (ja) 半導体ウエハ貼付装置
JPH01129824U (en])
JPS62154648U (en])
JPH01140822U (en])
JPH0454011U (en])
JPS6382941U (en])
JPH0325233U (en])
JPH02113330U (en])
JPH02132940U (en])
JPH03122533U (en])
JPH0467344U (en])
JPH0389168U (en])
JPS62166625U (en])
JPH02110334U (en])
JPH01174936U (en])
JPS62196341U (en])